Spare Parts


Novellus 02-127587-00 PVD PRECLEAN SIOC Controller...
Novellus 02-160858-00 ASSY COOLPEDLIFT LDLK VECTOR...
Novellus 02-167049-00 SESIOC 0 PVD IXT Controller...
Novellus 02-167674-00 Gamma 2130 RF Match...
Novellus 02-169146-00 GAMMA 300MM GAMMA 300MM Assy...
Novellus 02-169181-00 Gamma 2130 RF Match...
Novellus 02-252197-00 TERMINAL PANEL CONTROLLER...

Out Of Stock

Novellus 02-252397-00 Digital Dynamics Vector HDSI...

Out Of Stock

Novellus 02-253704-00 Assy MC3E Module Controller ...
Novellus 02-257829-00 ASSY,PC3A, PLATFORM CONTROLL...

Out Of Stock

Novellus 02-259783-00 PED Lift Assy Preheat C3VCTR...
Novellus 02-264836-00 02-267289-00 TOP LEV ESC Ass...
Novellus 02-264900-00 Gamma 2130 RF Match...
Novellus 02-265264-00 SESIOC 1 PVD IXT Controller...
Novellus 02-267032-00 SIOC 2 Module...

Novellus 02-267032-00 SIOC 2 Module...

..

US$3,000

Novellus 02-267673-00 PVD PRECLEAN 0 Controller...
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