Spare Parts

Varian E11576720 Chamber Assy...

Varian E11576720 Chamber Assy...

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US$9,000

Varian E11583292 ESC...

Varian E11583292 ESC...

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Out Of Stock

Varian E11583293 ESC...

Varian E11583293 ESC...

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Varian E15000031 Digital I/O PCB Assy...

Varian E15000031 Digital I/O PCB Assy...

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US$300

Varian E15000150 Proteus Signal Conditioner Assy...

Varian E15000150 Proteus Signal Conditioner Assy...

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US$500

Varian E15000201 Motion Controller Board ...

Varian E15000201 Motion Controller Board ...

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US$500

Varian E15000206 Motion Controller PCB...

Varian E15000206 Motion Controller PCB...

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US$500

Varian E15000208 Motion Controller PCB...

Varian E15000208 Motion Controller PCB...

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US$500

Out Of Stock

Varian E15000320 Elevator Control Board...

Varian E15000320 Elevator Control Board...

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US$200

Varian E15000911 I/V Converter Board...

Varian E15000911 I/V Converter Board...

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US$800

Varian E15000920 MCC Interface 4 Channel PCB...

Varian E15000920 MCC Interface 4 Channel PCB...

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US$400

Out Of Stock

Varian E15000940 Wafer Handler Orienter PCB...

Varian E15000940 Wafer Handler Orienter PCB...

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Out Of Stock

Varian E15001000 Digital I/O PCB...

Varian E15001000 Digital I/O PCB...

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Varian E15001032 Elevator Interface Board...

Varian E15001032 Elevator Interface Board...

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US$500

Out Of Stock

Varian E15001250 Serial A/D Interface Board...

Varian E15001250 Serial A/D Interface Board...

..

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Out Of Stock

Varian E15001610 Servo Controller PCB...

Varian E15001610 Servo Controller PCB...

..

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