| Spare Parts | |
| OEM Maker | KLA-Tencor |
| OEM Part No. | 750-614701-000 |
| Condition | Used |
| Quantity | 3 |
| Remark | VAT 02112-BA24-ARR1 x 2,VAT 02112-BA24-AJY1 x 1 |
| Spare Parts | |
| OEM Maker | KLA-Tencor |
| OEM Part No. | 750-614701-000 |
| Condition | Used |
| Quantity | 3 |
| Remark | VAT 02112-BA24-ARR1 x 2,VAT 02112-BA24-AJY1 x 1 |