1.KLA 300DFF1P Load Port ASYST 300FL,S3 STD,KT07 x 2(9700-0038-01)
2.Brooks Automation SC81-CE Controller
3.Brooks Automation ABM407B-1-B-S-CE-S293 Robot
4.PRI TRA035-LPS track controller
5.Brooks Automation PRE-300BU-I-CE-S2 Pre Aligner
6.missing one VME Power PCB
7.KLA Software DVD
8. One Calibration Wafer (DSW4LR6)
Spare Parts | |
Condition | Used |
Used Equipments | |
OEM Maker | KLA-Tencor |
Model Type | Archer 10 |